材料科学
兴奋剂
薄膜
旋涂
带隙
镓
掺杂剂
四方晶系
分析化学(期刊)
溶胶凝胶
浸涂
无定形固体
电阻率和电导率
相(物质)
光电子学
纳米技术
化学
结晶学
涂层
冶金
有机化学
工程类
电气工程
色谱法
作者
Chien‐Yie Tsay,Shan-Chien Liang
标识
DOI:10.1016/j.jallcom.2014.10.003
摘要
P-type transparent tin oxide (SnO2) based semiconductor thin films were deposited onto alkali-free glass substrates by a sol–gel spin-coating method using gallium (Ga) as acceptor dopant. In this study, we investigated the influence of Ga doping concentration ([Ga]/[Sn] + [Ga] = 0%, 5%, 10%, 15%, and 20%) on the structural, optical and electrical properties of SnO2 thin films. XRD analysis results showed that dried Ga-doped SnO2 (SnO2:Ga) sol–gel films annealed in oxygen ambient at 520 °C for 1 h exhibited only the tetragonal rutile phase. The average optical transmittance of as-prepared thin film samples was higher than 87.0% in the visible light region; the optical band gap energy slightly decreased from 3.92 eV to 3.83 eV with increases in Ga doping content. Hall effect measurement showed that the nature of conductivity of SnO2:Ga thin films changed from n-type to p-type when the Ga doping level was 10%, and when it was at 15%, Ga-doped SnO2 thin films exhibited the highest mean hole concentration of 1.70 × 1018 cm−3. Furthermore, a transparent p-SnO2:Ga (Ga doping level of 15%)/n-ZnO:Al (Al doping level of 2%) heterojunction was fabricated on alkali-free glass. The I–V curve measurement for the p–n heterojunction diode showed a typical rectifying characteristic with a forward turn-on voltage of 0.65 V.
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