Influence of non-confined electrons at the boundaries in a HPPMS discharge - limit to gyro-average validity
作者
Sara Gallian,Denis Eremin,Thomas Mussenbrock,Ralf Peter Brinkmann
标识
DOI:10.1109/plasma.2012.6383361
摘要
Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a novel Ionized Physical Vapor Deposition (IPVD) technique, able to achieve an ultra dense plasma with a high ionization degree of sputtered atoms.