A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems(MEMS),and the vibration of a MEMS resonator has been measured.In the signal processing,removed by using a circuit,the high frequency carrier is first the Wigner-Ville distribution of time-frequency analysis is used to analyze the Doppler signal and extract the velocity.Compared with the result of the counting method,the time-frequency is more effective.