Twist‐Angle Controllable Transfer of 2D Materials via Water Vapor Intercalation

Transfer technique has become an indispensable process in the development of two-dimensional materials (2DMs) and their heterostructures, as it determines the quality of the interface and the performance of the resulting devices. However, how to flexibly and conveniently fabricate two-dimensional (2D) twisted heterostructures with high-quality interfaces has always been a formidable challenge. Here, a quasi-dry transfer technique assisted by water vapor intercalation (WVI) is developed, which can be flexibly used to fabricate twisted heterostructures. This method leverages a charged hydrophilic surface to facilitate WVI at the interface, enabling the clean and uniform detachment of 2DMs from the substrate. Using this method, the twisted monolayer/few-layer graphene and 2D quasicrystal-like WS₂/MoS₂, highlighting the surface/interface cleanness and angle-controlled transfer method is successfully fabricated. Besides, suspended structures of these 2DMs and heterostructures are fabricated, which offers substantial convenience for studying their intrinsic physical properties. Further, a high-performance hBN/graphene/hBN superlattice device with the mobility of ≈199,000 cm² V^-1 s^-1 at room temperature is fabricated. This transfer technique ingeniously combines the advantages of dry transfer and wet transfer. Moreover, it features excellent scalability, providing crucial technical support for future research on the fundamental physical properties of 2DMs and the fabrication of quantum devices with outstanding performance.