An integratible acoustic micropump based on the resonance of on-substrate sharp-edge micropillar arrays

. The corresponding pumping pressure exceeds 1.3 kPa, more than an order of magnitude higher than its predecessors. In experimental demonstrations, two micropumps are employed as feeding units for an acoustofluidic particle separation device based on tilted-angle standing surface acoustic waves (TaSSAWs). The current micropump exhibits advantages of high pumping pressure, fast response time, and high reliability, making it a promising pumping unit for lab-on-a-chip systems.