材料科学
钙钛矿(结构)
金属有机气相外延
氧化物
化学气相沉积
薄膜
纳米技术
电介质
化学工程
光电子学
冶金
外延
图层(电子)
工程类
作者
F. Presti,Anna Osello,Graziella Malandrino
标识
DOI:10.1002/admi.202102501
摘要
Perovskite oxide type materials exhibit a great profusion of unique functional properties and for this reason they have been named inorganic chameleon. Nevertheless, their actual applications require the availability of these systems in thin-film form synthesized through a simple, scalable, and straightforward technique. Metal-organic chemical vapor deposition (MOCVD) has been shown to be an outstanding process to prepare thin films of multi-component oxides. Herein, the focus is devoted to oxide perovskite thin films on both single crystal and non-single crystal substrates through MOCVD processes. This study discusses the principles and the basic rules governing conventional, plasma-enhanced, and liquid-assisted MOCVD processes. Among a plethora of oxide perovskites, several classes of functionalities belonging to the perovskite class: from superconductors to dielectrics and giant-k dielectrics, from colossal magnetoresistance to ionic conductors, piezoelectrics and ferroelectrics, are explored in detail.
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