Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

The preparation of low-cost and large-area nanostructures is one of the frontier hotspots and difficulties in the field of nanotechnology. We propose a method for the preparation of nanostructures by using plasma to etch anodic aluminum oxide (AAO) membrane. The transmission characteristics of plasma particles in AAO nanopores are explored. And the precise control of the porous AAO structure is achieved. The nanostructure is successfully transferred to the LED chip, and the luminous efficiency is improved. These studies will provide a good theoretical and technical basis for the precise transfer of nanostructures and the low-cost preparation of large-area nanostructured devices.