The bend of cantilever as an executive mechanism of electrostatic microactuator

Executive mechanism of microactuator under electrostatic actuation is considering in the paper. Mechanism has presented in form of a flat cantilever, which has been bending under the influence of Coulomb forces. There are considering and resolving nonlinear equations, which defines the form of cantilever's bend. Obtained decisions are necessary to calculate characteristics of microactuator.