The Advanced Aluminum Nitride Synthesis Methods and Its Applications: Patent Review

氮化物 纳米技术 碳热反应 材料科学 冶金 碳化物 图层(电子)
作者
Р. А. Шишкин,А. А. Елагин,Ekaterina S. Mayorova,А. Р. Бекетов
出处
期刊:Recent Patents on Nanotechnology [Bentham Science Publishers]
卷期号:10 (2): 146-156 被引量:5
标识
DOI:10.2174/1872210510999160414150634
摘要

Background: High purity nanosized aluminum nitride synthesis is a current issue for both industry and science. However, there is no up-to-date review considering the major issues and the technical solutions for different methods. This review aims to investigate the advanced methods of aluminum nitride synthesis and its development tendencies. Also the aluminum nitride application patents and prospects for development of the branch have been considered. Methods: The patent search on “aluminum nitride synthesis” has been carried out. The research activity has been analyzed. Special attention has been paid to the patenting geography and the leading researchers in aluminum nitride synthesis. Results: Aluminum nitride synthesis methods have been divided into 6 main groups, the most studied approaches are carbothermal reduction (88 patents) and direct nitridation (107 patents). The current issues for each group have been analyzed; the main trends are purification of the final product and nanopowder synthesis. The leading researchers in aluminum nitride synthesis have represented 5 countries, namely: Japan, China, Russia, South Korea and USA. The main aluminum nitride application spheres are electronics (59,1 percent of applications) and new materials manufacturing (30,9 percent). Conclusion: The review deals with the state of the art data in nanosized aluminum nitride synthesis, the major issues and the technical solutions for different synthesis methods. It gives a full understanding of the development tendencies and of the current leaders in the sphere. Keywords: Aluminum, application, carbothermal, chemical purity, CVD, direct nitridation, gas-phase synthesis, nitride, reduction, synthesis, thermal conductivity.
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