FIB Preparation of Mesa Structures for SIMS Analysis

Journal Article FIB Preparation of Mesa Structures for SIMS Analysis Get access J M McKinley, J M McKinley Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836 Search for other works by this author on: Oxford Academic Google Scholar B B Rossie, B B Rossie Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836 Search for other works by this author on: Oxford Academic Google Scholar M A Decker, M A Decker Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836 Search for other works by this author on: Oxford Academic Google Scholar F A Stevie F A Stevie North Carolina State University, 1010 Main Campus Drive, Box 7531, Raleigh, NC 27695 Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 8, Issue S02, 1 August 2002, Pages 542–543, https://doi.org/10.1017/S1431927602105381 Published: 01 August 2002