薄膜
材料科学
退火(玻璃)
溅射
沉积(地质)
蒸发
分析化学(期刊)
超导电性
硼
溅射沉积
冶金
纳米技术
凝聚态物理
化学
物理
沉积物
有机化学
古生物学
热力学
生物
色谱法
作者
Takumu Iwanaka,Toshiaki Kusunoki,Hiroshi Kotaki,Motomune Kodama,Hideki Tanaka,A. Matsumoto,Shigeru Horii,Iwao Kawayama,Toshiya Doi
标识
DOI:10.35848/1347-4065/ac38fa
摘要
Abstract A new in situ process for depositing MgB 2 film is being developed in the present study as a candidate method to facilitate the mass production of MgB 2 -thin-film superconducting tapes. Here, a MgB 2 film was synthesized on a heated copper substrate via “hybrid deposition,” comprising thermal evaporation of magnesium and sputtering of boron. High-temperature post-annealing was performed to increase the critical current density ( J c ) of the MgB 2 thin films obtained via hybrid deposition. The J c of the MgB 2 film deposited at 360 °C by hybrid deposition and post-annealed at 430 °C was drastically improved to 1100 A mm −2 at 20 K under 4 T, 79 000 A mm −2 at 15 K under 3 T, and 59 000 A mm −2 at 10 K under 5 T under a magnetic field parallel to the film. It was expected that the incorporation of hybrid deposition in processing using a reel-to-reel machine would facilitate the synthesis of high- J c , long MgB 2 -thin-film superconducting wires.
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