Numerical simulation of the piezoresistive effect of βGa2O3 in the <010> direction

Abstract β -Ga 2 O 3 has a high potential for power device applications because of a high Baliga’s figure and the availability of large-scale wafers. However, the piezoresistive effect of β -Ga 2 O 3 has not been investigated in detail, and its piezoresistive coefficient has not been reported. This study evaluates the piezoresistive coefficient of β -Ga 2 O 3 in the <010> direction using a mechanical stress simulator and a device simulator, which includes our piezoresistive effect model. In this study, the piezoresistive effect model and simulation method are applied to β -Ga 2 O 3 for the first time. The piezoresistor model of β -Ga 2 O 3 is simulated to evaluate the piezoresistive coefficient of β -Ga 2 O 3 . The experimentally obtained gauge factor with and without the contact effect is −5.8 and −3.6, respectively. The piezoresistive coefficient with and without the contact effect is −2.0 × 10 −11 Pa −1 and −1.2 × 10 −11 Pa −1 , respectively. The piezoresistive coefficient is used to evaluate the piezoresistive effect at 1000 °C through thermal analysis.