Heterogeneous integration in silicon photonics through micro-transfer-printing
作者
Jing Zhang,Grigorij Muliuk,Jeroen Goyvaerts,Bahawal Haq,Sulakshna Kumari,Joan Juvert,Camiel Op de Beeck,Bart Kuyken,Joris Van Campenhout,Guy Lepage,Peter Verheyen,Agnieszka M. Gocalinska,E. Pelucchi,Brian Corbett,António José Trindade,Chris Bower,Günther Roelkens
Micro-transfer-printing enables the intimate integration of a wide range of opto-electronic micro-components on a silicon photonics platform. This technique allows for wafer-scale integration in a massively parallel manner with high alignment accuracy, high throughput and high yield, therefore leading to a cost reduction of complex photonic integrated circuits.