光学
轮廓仪
极化(电化学)
结构光三维扫描仪
线极化
正交偏振光谱成像
单发
结构光
物理
空间频率
材料科学
激光器
表面粗糙度
物理化学
扫描仪
化学
量子力学
作者
Yoshinori Maeda,Shuhei Shibata,Nathan Hagen,Yukitoshi Otani
出处
期刊:Applied Optics
[The Optical Society]
日期:2020-02-14
卷期号:59 (6): 1654-1654
被引量:2
摘要
We demonstrate a uniaxial 3D profilometry system illuminating the sample with a linear polarization pattern and measuring a polarization camera. The linear polarization pattern is generated by a spatial light modulator and a quarter-wave plate in the optical system. The system can measure four different fringe patterns with a phase difference of 90 deg simultaneously in the polarization camera. Therefore, we can measure three-dimensional shapes in a single shot. We present the measurement principles of the system and show the results of a real-time 3D profilometry experiment.
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