基于微环谐振器的新型加速度传感器

A novel microring resonator accelerometer is proposed.It is realized by a suspended straight waveguide coupled with a microring resonator.Under the external acceleration, the coupling coefficient is a function of gap spacing between the two waveguides.The mathematical model of the sensing element is established.Both the finite element method and coupled mode theory are adopted to analyze and optimize the proposed structure.Simulation results show that the mechanical sensitivity is 0.015 µm/g with the working frequency below 500 Hz and cross-axis sensitivity less than 0.001%, which is promising in seismic related applications.