ZnO Thin Films Deposited on Sapphire by High Vacuum High Temperature Sputtering

ZnO (0001) layers on sapphire (0001) substrates were fabricated by means of high temperature high vacuum magnetron sputtering.The layers were deposited onto a thin MgO buffer and a low temperature ZnO nucleation layer, which is a technology commonly used in MBE ZnO growth.This paper reports on using this technology in the sputtering regime.