A novel high Q inductor based on double-sided substrate integrated suspended line technology with patterned substrate

This paper presents a novel self-packaged high quality factor spiral inductor based on substrate integrated suspended line technology. Suspended substrate are hollowed in specific shape for reducing the dielectric substrate loss. Double-sided interconnected stripline is used for diminishing the metal ohmic loss. Simulation and measurement results demonstrate that the double-sided interconnected spiral inductor with patterned substrate can improve inductor quality factor up to 40%.