A high-speed micro-ring modulator for next generation energy-efficient optical networks beyond 100 Gbaud

We demonstrate a silicon micro-ring modulator supporting 128 Gb/s NRZ modulation with SNR=5.2, ER=3.8dB, 0.8 Vpp drive swing, and 5.3 fJ/bit power consumption. We have also achieved 192 Gb/s PAM-4 modulation with TDECQ of 2.5dB.