Optimizing breakdown voltage and on-state resistance by modulating the barrier height along 2DEG channel for power p-GaN HEMTs

高电子迁移率晶体管 阻挡层 击穿电压 光电子学 材料科学 电压 功率密度 阈值电压 费米气体 图层(电子) 功率(物理) 晶体管 化学 电气工程 电子 纳米技术 物理 工程类 量子力学
作者
Yajie Xin,Wanjun Chen,Ruize Sun,Chao Liu,Yun Xia,Fangzhou Wang,Xiaochuan Deng,Zhaoji Li,Bo Zhang
出处
期刊:Semiconductor Science and Technology [IOP Publishing]
卷期号:37 (12): 125004-125004 被引量:3
标识
DOI:10.1088/1361-6641/ac9996
摘要

Abstract This article proposes a novel step-type gate p-GaN HEMT (STG-HEMT) to optimize breakdown voltage (BV) and on-state resistance (R ON) by modulating the barrier height along the two-dimensional electron gas (2DEG) channel. The step-type gate consists of thicker and thinner p-GaN layers. At off-state, the barrier height is higher due to the clamping potential effect induced by the thinner p-GaN layer, which contributes to improving BV. At on-state, the barrier height under the thinner p-GaN layer is lower, which contributes to improving 2DEG density under the gate (namely reducing R ON). Verified by the calibrated simulation, the results show STG-HEMT’s BV is increased by 55% and STG-HEMT’s R ON is decreased by 20% compared with the conventional power p-GaN HEMT (C-HEMT). At transient behavior, the total switching loss keeps nearly unchanged, while the gate driver loss is increased by about 19%. Furthermore, the impact of the gate length and p-GaN layer’s parameters (including thickness, length, activated Mg doping density) on R ON, BV, and threshold voltage are discussed.

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