材料科学
氮化铬
物理气相沉积
溅射沉积
涂层
基质(水族馆)
腔磁控管
沉积(地质)
溅射
铝
氮化铝
氮化物
冶金
高功率脉冲磁控溅射
复合材料
薄膜
图层(电子)
纳米技术
地质学
生物
古生物学
沉积物
海洋学
作者
Tonica Bončina,Srečko Glodež,Brigita Polanec,Lara Hočuršćak,Franc Zupanič
出处
期刊:Materials
[Multidisciplinary Digital Publishing Institute]
日期:2023-06-13
卷期号:16 (12): 4365-4365
被引量:7
摘要
This study presents a comprehensive analysis of different coating materials on the POM substrate. Specifically, it investigated physical vapour deposition (PVD) coatings of aluminium (Al), chromium (Cr), and chromium nitride (CrN) of three various thicknesses. The deposition of Al was accomplished through a three-step process, particularly plasma activation, metallisation of Al by magnetron sputtering, and plasma polymerisation. The deposition of Cr was attained using the magnetron sputtering technique in a single step. For the deposition of CrN, a two-step process was employed. The first step involved the metallisation of Cr using magnetron sputtering, while the second step involved the vapour deposition of CrN, obtained through the reactive metallisation of Cr and nitrogen using magnetron sputtering. The focus of the research was to conduct comprehensive indentation tests to obtain the surface hardness of the analysed multilayer coatings, SEM analyses to examine surface morphology, and thorough adhesion analyses between the POM substrate and the appropriate PVD coating.
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