2.45-μm 1280 × 1024 InGaAs Focal Plane Array With 15-μm Pitch for Extended SWIR Imaging

A $15~\mu \text{m}$ pitch extended wavelength In _0.83 Ga _0.17 As/ InP mega-pixel focal plane array (FPA) with a format of 1280 $\times 1024$ and a spectral response range of 1150–2450 nm has been demonstrated for the first time. High fill factor up to >86%, low dark current densities down to < 133 nA/cm ² , high quantum efficiencies up to >69%, were achieved by implementing novel high density micro-mesa array processing technologies. A proprietary wafer bowing control technique was developed, attaining a high pixel operability of 99.37%. Laboratory imaging was also demonstrated, showing potentiality for high resolution imaging applications in a wider SWIR spectrum range.