Column-addressable and matrix-addressable multi-junction VCSEL arrays for all electronic-scanning LiDAR

In designing LiDAR systems for a mass market, it is desirable to scan a scene without moving parts and with optics and packaging that are robust and simple to manufacture. VCSEL arrays have already emerged in consumer LiDAR systems that reach several meters. Extending those distances requires packing higher peak optical power into narrower angular slices or blocks and addressing those electronically. Detector arrays are commonly read out line-by-line; accordingly, sources for these arrays must ideally emit power into narrow angular slices. An array arranged into narrow addressable stripes shown through a lens will do just that. We present 940nm arrays of 100 or more narrow (<0.16mm) stripes that each emit <50W peak power when driven for a few ns, <0.1% duty-cycle. The arrays have multiple anode contacts and a single backside cathode contact. Multiple light-emitting junctions enable high slope-efficiency (<4W/A) that reduces the current per channel required. Such stripe arrays may still illuminate more than one line on the detector or may require stripes so narrow as to cause high electrical resistance. For detector arrays that may be read-out in blocks with aspect ratio closer to one, we present 905nm and 940nm matrix-addressable VCSEL arrays that emit over 50W peak-power from regions < 0.06mm2 when driven with short (few ns) pulses at low (<0.1%) duty-cycle over 80oC. Such arrays have a linear array of cathode traces perpendicular to a linear array of anode traces. This arrangement permits MxN regions to be addressed with only M+N electrical contacts.