Zirconium nitride films prepared by cathodic arc plasma deposition process

Zirconium nitride has been reactively deposited using the cathodic arc plasma deposition process. Deposited films have been analyzed for their surface morphology, crystal structure, microhardness and composition. Performance of the films was evaluated by conventional wear testing methods and the potential for decorative applications by reflectivity measurements. Wear test results indicated that ZrN is marginally superior to titanium nitride in conventional metal cutting applications, but outperforms TiN by a factor of two when cutting titanium alloys. Reflectance measurements indicate that ZrN-doped films are very similar to gold films.