材料科学
电介质
纳米电子学
纳米技术
光电子学
石墨烯
化学气相沉积
纳米点
氮化硼
作者
Jian Zhu,Joohoon Kang,Junmo Kang,Deep Jariwala,Joshua D. Wood,Jung-Woo T. Seo,Kan‐Sheng Chen,Tobin J. Marks,Mark C. Hersam
出处
期刊:Nano Letters
[American Chemical Society]
日期:2015-09-08
卷期号:15 (10): 7029-7036
被引量:110
标识
DOI:10.1021/acs.nanolett.5b03075
摘要
Gate dielectrics directly affect the mobility, hysteresis, power consumption, and other critical device metrics in high-performance nanoelectronics. With atomically flat and dangling bond-free surfaces, hexagonal boron nitride (h-BN) has emerged as an ideal dielectric for graphene and related two-dimensional semiconductors. While high-quality, atomically thin h-BN has been realized via micromechanical cleavage and chemical vapor deposition, existing liquid exfoliation methods lack sufficient control over h-BN thickness and large-area film quality, thus limiting its use in solution-processed electronics. Here, we employ isopycnic density gradient ultracentrifugation for the preparation of monodisperse, thickness-sorted h-BN inks, which are subsequently layer-by-layer assembled into ultrathin dielectrics with low leakage currents of 3 × 10–9 A/cm2 at 2 MV/cm and high capacitances of 245 nF/cm2. The resulting solution-processed h-BN dielectric films enable the fabrication of graphene field-effect transistors with negligible hysteresis and high mobilities up to 7100 cm2 V–1 s–1 at room temperature. These h-BN inks can also be used as coatings on conventional dielectrics to minimize the effects of underlying traps, resulting in improvements in overall device performance. Overall, this approach for producing and assembling h-BN dielectric inks holds significant promise for translating the superlative performance of two-dimensional heterostructure devices to large-area, solution-processed nanoelectronics.
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