过程(计算)
晶体生长
增长模型
材料科学
控制(管理)
工艺工程
计算机科学
工程类
化学
结晶学
数学
人工智能
操作系统
数理经济学
作者
Stefan Ecklebe,Frank Woittennek,Christiane Frank‐Rotsch,Natasha Dropka,Jan Winkler
标识
DOI:10.1109/tcst.2021.3058006
摘要
In this contribution tracking control designs using output feedback are presented for a two-phase Stefan problem arising in the modeling of the Vertical Gradient Freeze process. The two-phase Stefan problem, consisting of two coupled free boundary problems, is a vital part of many crystal growth processes due to the temporally varying extent of the solid and liquid domains during growth. After discussing the special needs of the process, collocated as well as flatness-based state feedback designs are carried out. To render the setup complete, an observer design is performed, using a flatness-based approximation of the original distributed parameter system. The quality of the provided approximations as well as the performance of the open and closed loop control setups is analysed in several simulations.
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