Ce3+-doped YAG and LuAG single crystal are widely used for scintillation applications. Thin epitaxial films represent an interesting alternative to the bulk single crystals for 2D imaging scintillation screens with submicron resolution. Compared to the Czochralski grown single crystals, the epitaxial films can be grown from the flux at much lower growth temperatures and consequently with lower structural disorder and lower concentration of intrinsic defect