材料科学
超声波传感器
戒指(化学)
声学
灵敏度(控制系统)
电子工程
物理
有机化学
化学
工程类
作者
Tao Liu,Jiahuan Zhang,Dongxiao Li,Pengfan Wu,Jiajia Zhang,Hanjie Dou,Mingyang Zhang,X. B. Yang,Liuqiang Zhang,Xiaojing Mu
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2023-10-01
卷期号:23 (19): 22240-22247
被引量:1
标识
DOI:10.1109/jsen.2023.3298671
摘要
Here, we report a differential ring array of piezoelectric micromachined ultrasonic transducers (pMUTs) for ultralong-range detection. Among them, the differential structure is used to improve the sensitivity of the device, and the ring array is used to improve the generated sound intensity. The synergy between the differential structure and the ring array improves the acoustic performance of pMUTs. The piezoelectric material adopts aluminum nitride (AlN) thin film compatible with complementary metal–oxide–semiconductor (CMOS) process. The resonant frequency of the device (80 kHz), the piezoelectric film radius ( $500 \mu \text{m}$ ), and the top electrode ratio were optimized using the finite element method. Compared to pMUTs with central circular electrodes, the differential structure provides two times the low-frequency drive sensitivity and two times the center displacement at the resonant frequency. Seven elements with differential structure were used to form a ring pMUTs array, and the size of the ring pMUTs array was $5\times5$ mm2. Further research shows that the ring pMUTs array can achieve a very large range ( $\ge 0.6$ m) detection, and the range error is less than 2.4 mm. The differential ring pMUTs array provides a valuable reference for obstacle avoidance, flow measurement, liquid-level measurement, and other fields.
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