Low-Temperature Superconductor rf-SQUIDs-Based Fully Integrated Reflective-Type Analog Phase Shifter for Quantum Applications

This article presents a low-temperature superconductor (LTS)-based microwave phase shifter. The device utilizes a superconducting hybrid coupler monolithically integrated with two tunable reflective loads. An array of radio frequency superconducting quantum interference devices (rf-SQUIDs) is used to achieve inductive tuning in reflective loads, resulting in a broadband true time delay phase shift. The rf-SQUIDs are current controlled using an on-chip dc bias circuitry. The proof-of-concept fabricated device provides excellent RF performance in the ${X}$ - and Ku -band with a phase shift of 49° at 10 GHz and 67° at 15 GHz. The insertion loss is < 1.5 dB for the entire range from 8 to 18 GHz. The methods to further improve the obtained phase shift are discussed. The overall device has a chip footprint of 0.6 mm2 and is fabricated using MIT-Lincoln Lab (MIT-LL) SFQ5ee eight-layer Niobium (Nb)-based superconducting fabrication process.