极紫外光刻
极端紫外线
放气
光源
光学
抵抗
物理
计算机科学
材料科学
天文
纳米技术
激光器
图层(电子)
作者
Samuel Gunnell,Mae Steinberg
摘要
Energetiq's EUV light sources are the industry standard source for EUV infrastructure RD, inspection, resist development, outgassing, mirror testing, and more. The Electrodeless Z-Pinch EUV Source is a reliable and stable source of EUV photons and is being operated in the field 24/7 with consistent operation over many years. This video focuses on Energetiq's EQ-10HP light source. For product information visit www.energetiq.com or email info@energetiq.com to discuss your application.
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