NMOS逻辑
材料科学
二硫化钼
晶体管
薄脆饼
电子线路
半导体
场效应晶体管
集成电路
数码产品
纳米技术
光电子学
电子工程
电气工程
电压
工程类
冶金
作者
Xinyu Wang,Michael B. McElroy,Jingyi Ma,Saifei Gou,Xiaojiao Guo,Ling Tong,Junqiang Zhu,Yin Xia,Die Wang,Chu-ming Sheng,Honglei Chen,Zhengzong Sun,Shunli Ma,Antoine Riaud,Zihan Xu,Chunxiao Cong,Zhi-Jun Qiu,Peng Zhou,Yufeng Xie,Lifeng Bian,Wenzhong Bao
标识
DOI:10.1002/adma.202202472
摘要
Two-dimensional (2D) semiconductors, such as molybdenum disulfide (MoS2), have attracted tremendous attention in constructing advanced monolithic integrated circuits (ICs) for future flexible and energy-efficient electronics. However, the development of large-scale ICs based on 2D materials is still in its early stage, mainly due to the non-uniformity of the individual devices and little investigation of device and circuit level optimization. Herein, we successfully synthesized a 4-inch high-quality monolayer MoS2 film, which was then used to fabricate top gated (TG) MoS2 field-effect transistors (FETs) with wafer-scale uniformity. Some basic circuits such as SRAM and ring oscillators were first examined. A pass-transistor logic configuration based on pseudo-NMOS was then employed to design more complex MoS2 logic circuits, which were successfully fabricated with proper logic functions tested. These preliminary integration efforts show the promising potential of wafer-scale 2D semiconductors for application in complex ICs. This article is protected by copyright. All rights reserved
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