Effect of acidic/alkalinity slurry on titanium alloy CMP performance under different rotation speed condition

Aiming at the poor machinability of titanium alloy parts, the effect of slurry properties (acidic/alkalinity and volume ratio) on CMP performance were investigated. The results showed that the selected parameters all had an obviously effect on CMP performance. For acidic slurry case, smaller scratches and lower value of surface roughness (0.0645 μm) were observed, but the reverse sides were emerged with alkalinity slurry (0.0867 μm). Moreover, bigger material remove rate of the test sample was obtained with alkalinity slurry (7.4 102 m/min) than acidic case (5.56 102 m/min) especially in 80 r/min. A research conclusion is obtained that chemical reactions between titanium alloy and acidic slurry is easily produced. But, only corrosion action is existed for alkalinity condition which increases the brittleness and hardness characteristic of the sample surface. It is benefit for the increasing of material remove rate.