A Model for Cavity Induced Errors with Wavefront Slope in High Accuracy Spherical Fizeau Metrology
菲索干涉仪
物理
光学
波前
波前传感器
计量学
作者
Daniel Sýkora
标识
DOI:10.1364/oft.2008.owb7
摘要
High accuracy spherical testing demands consideration of induced errors as a function of wavefront slope and cavity geometry. A geometric model is presented that enables characterization of transmission sphere performance over a range of cavities.