Ultra-compact silicon mode (de)multiplexer based on directional couplers with subwavelength sidewall corrugations

Asymmetrical directional couplers aided with subwavelength sidewall corrugations are used to realize ultra-compact silicon mode (de)multiplexers at C-band. Three mode (de)multiplexers with ultra-short coupling lengths of 5.6/6.5/7.7 μm are designed to enable low-loss mode conversions between TE0 and TE1/2/3 modes. They are then cascaded to build a four-channel mode-division-multiplexing (MDM) link. The four mode channels present minimal on-chip insertion losses of 0.2/0.7/0.7/0.9 dB at their peak wavelengths. Measured cross talk levels of the four mode channels are better than -18.0/-19.1/-16.0/-18.2 dB within the wavelength range from 1530 nm to 1580 nm.