Soft X-ray Absorption Study of III-V Nitrides

The soft X-ray absorption measurement around nitrogen K and aluminum K edge of the wurtzite AlN, GaN and their ternary compounds AlGaN have been performed. The incidence light angle dependence of the absorption spectra were clearly observed in all samples. A numerical component analysis is presented to separate the experimental K-absorption spectra into three partial spectra which correspond to in-plane, out-of-plane and angular independent components of the unoccupied p partial density of states.