五氧化二钽
材料科学
无定形固体
X射线光电子能谱
偶极子
钽
分析化学(期刊)
离子束
液晶
溅射沉积
离子
溅射
分子物理学
核磁共振
结晶学
化学
光电子学
薄膜
纳米技术
物理
色谱法
有机化学
冶金
作者
Jongjin Lee,Hyung Jun Kim,Young-Gu Kang,Young Hwan Kim,Hong‐Gyu Park,Byoung-Yong Kim,Dae‐Shik Seo
标识
DOI:10.1143/jjap.50.031701
摘要
We achieved vertically aligned (VA) liquid crystals (LCs) on amorphous tantalum pentoxide (Ta 2 O 5 ) alignment films deposited by radio frequency (rf) magnetron sputtering using ion beam (IB) irradiation. By analyzing measurements by X-ray photoelectron spectroscopy (XPS), we confirmed the bond breaking, as detected from the O 1s spectra, which caused an isotropic dipole–dipole interaction between the LC molecules and the Ta 2 O 5 alignment film to uniformly align the vertical LC molecular orientation as a function of IB energy density. Moreover, by examining the electro-optical (EO) characteristics of the Ta 2 O 5 surfaces compared with those of the polyimide (PI) alignment layer, we confirmed that Ta 2 O 5 has a low threshold voltage and a low power consumption when used as an LC alignment layer.
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