材料科学
微观结构
纳秒
激光器
硅
光学
无定形固体
辐照
光电子学
激光功率缩放
非晶硅
表面粗糙度
晶体硅
复合材料
化学
结晶学
物理
核物理学
作者
Yingming Ren,Zhiyu Zhang
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2021-09-17
卷期号:29 (21): 33804-33804
被引量:8
摘要
Laser-induced microstructures have attracted significant research interest owing to their wide application potential for anti-reflective surfaces and optoelectronic devices. To elucidate the characteristics of laser-patterned microstructures, nanosecond-laser-induced micro-protrusions on amorphous silicon film surfaces were investigated via single-and multi-line irradiation experiments. For the former, the results reveal that the number of periodic micro-protrusions depends on the peak power intensity. In addition, the height and the base diameter of the micro-protrusions can be tailored by adjusting the peak power intensity and scanning distance of the laser, while increasing the peak power intensity also increases surface roughness. X-ray spectroscopy confirmed that the microstructures were mainly composed of silicon. The relationship between the formation mechanism and the size of the micro-protrusions is also discussed, with the results of this study providing valuable insights into the laser-induced microstructure formation.
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