Precision All-Optical EMC Test Technique of Integrated Circuits

Chip-level EMC testing and diagnostic analysis technology plays an important role in the design and development of highly integrated microwave and millimeter-wave chips. In this paper, an all-optical and non-invasive microwave magnetic field scanning probe system based on diamond NV color centers is constructed, with RF B-field sensitivity of 5 nT/√Hz and spatial resolution smaller than 10 micron. The frequency tuning from DC to 100 GHz magnetic resonance can be achieved by Zeeman splitting technique. Full vector reconstruction of microwave near field can be realized with its four crystal axis. The current distribution on the surface of the microchip under test can be deduced by the quantum magnetic field inverse radiation problem solver. The EMC problem on the chip surface can be further analyzed by the current distribution on the chip surface. The experimental system built in this paper verifies the feasibility of the system by microwave near-field imaging of a GaAs MMIC low-pass filter chip with 3dB cut-off frequency of 6GHz.