Short History of Interferometric Optical Metrology
作者
James C. Wyant
标识
DOI:10.1364/fio.2016.ftu1a.2
摘要
The use of the Twyman-Green interferometer for optical metrology was introduced the same year OSA was founded, 1916. This talk gives a short history of interferometric metrology and the enhancements provided by lasers and computers.