Short History of Interferometric Optical Metrology
作者
James C. Wyant
出处
期刊:Frontiers in Optics [Optica Publishing Group] 日期:2016-01-01卷期号:: FTu1A.2-FTu1A.2被引量:3
标识
DOI:10.1364/fio.2016.ftu1a.2
摘要
The use of the Twyman-Green interferometer for optical metrology was introduced the same year OSA was founded, 1916. This talk gives a short history of interferometric metrology and the enhancements provided by lasers and computers.