Continuously tunable ultra-thin silicon waveguide optical delay line

As light cannot be stopped or directly stored in any media, optical delay lines are usually used to temporally trap the optical signals. We report a wide-range continuously tunable optical delay line chip consisting of a ring resonator array and a Mach–Zehnder interferometer (MZI) switch array on the 60-nm-thick silicon waveguide platform. The ring delay line provides continuous delay tuning of more than 10 ps with a push–pull differential tuning method. The MZI switchable delay line provides digitally programmable delay tuning with a resolution of 10 ps upon reconfiguration of the MZI switches to establish different optical routing paths. Dual-stage MZI switches are used to ensure low crosstalk with an improved signal-to-noise ratio. The delay line chip can generate a maximum delay of >1  ns with an on-chip insertion loss of 12.4 dB. Optical pulse time-division multiplexing and quasi-arbitrary waveform generation are realized based on the delay line chip. These results represent a significant step towards the realization of highly reconfigurable optical signal processors enabled by optical delay manipulation with broad applications for optical communications and microwave photonics.