Temperature Sensing for MEMS Sensors: A Review, and Chances for the Frequency-Control Community

With an increasing demand of higher and higher performance for several microelectromechanical system (MEMS) based sensors, accurate temperature calibration and real-time compensation become a key enabling factor. Approaches to temperature (T) sensing operated directly on the MEMS die have inherent advantages over T-sensing implemented on the integrated or board level electronics. This work provides a review of temperature sensing approaches, with a special focus on those implemented through resonant operation of microstructures, providing the latest results for MEMS-based T sensors.