电阻式触摸屏
材料科学
电极
纳米传感器
肖特基二极管
光电子学
薄脆饼
信号(编程语言)
校准
肖特基势垒
石墨烯
电子工程
纳米技术
计算机科学
化学
电气工程
物理
工程类
物理化学
二极管
程序设计语言
量子力学
作者
Yuxin Zhao,Yue Su,Mengya Guo,Liqun Liu,Peng Chen,Anqi Song,Wei Yu,Shengsun Hu,R. Zhao,Zhen Fang,Huacheng Zhang,Yanli Zhao,Wenjie Liang
标识
DOI:10.1002/smtd.202101194
摘要
In the frontier resistive micro-nano gas sensors, the change rate reliability between the measured quantity and output signals has long been puzzled by the ineluctable device-to-device and run-to-run disparities. Here, a neotype sensing data interpretation method to circumvent these signal inconsistencies is reported. The method is based on discovery of a strong linear relation between the initial resistance in air (Ra ) and the absolute change in resistance after exposure to target gas (Ra -Rg ). Metal oxide gas sensors based on a micro-hot-plate are employed as the model system. The study finds that such correlation has a wide universality, even for devices incorporated with different sensing materials or under different gas atmosphere. Furthermore, this rule can also be extensible to graphene-based interdigital microelectrode. In situ probe scanning analyses illuminate that the linear dependence is closely related to work function matching level between metal electrode and sensitive layer. The Schottky barrier at metal-semiconductor junctions is the prominent parameter, whose height (ϕB ) can fundamentally impact material/electrode contact resistance, thereby further affecting the realistic nature expression of sensing materials. Using this correlation, a calibration procedure is proposed and embed in a fully integrated pocket-size sensor prototype, whose response outcomes demonstrated high credibility as compared to commercial apparatus.
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