High-power single-mode 894 nm VCSELs operating at high temperature (> 2 mW @ 365 K)

Abstract In this study, we realize the high-power output of a single-mode 894 nm vertical-cavity surface-emitting laser (VCSEL) at high temperature. The effects of the dimensional parameters of oxide aperture and surface relief on the transverse mode and threshold gain of VCSEL were analyzed. Through collaborative optimization of the oxide aperture and relief, the VCSEL with 8 µm oxide aperture diameter and 5 µm surface relief inner diameter can operate at high temperature of 365 K with single-mode output power of 2.02 mW and side-mode suppression of 29.2 dB.