Chemical enhancement in surface-enhanced Raman scattering (SERS) enables detection specificity by leveraging charge transfer (CT) between substrates and adsorbed molecules, a mechanism pivotal for designing next-generation SERS sensors with ultraselective molecular recognition capabilities. In this paper, based on the defect engineering, a Co-doped TiO2 film was prepared by the sol-gel method and spark plasma sintering furnace (SPS) approach. Multimodal characterizations (X-ray diffraction (XRD), transmission electron microscopy (TEM), atomic force microscopy (AFM), ultraviolet photoelectron spectrometry (UPS)) combined with the three-dimensional (3D) finite-difference time-domain (FDTD) simulation results reveal that Co doping enhances the Raman signal intensity via introducing oxygen vacancies and optimizes energy-level alignment. Innovatively, the charge transfer dynamics measured by ultrafast time-resolved photoluminescence spectroscopy (TRPL) further confirmed the superior carrier transfer property of the Co-doped TiO2 films. Importantly, the coexistence of two charge transfer pathways were explored: direct charge transfer from Co0.05Ti0.95O2 to R6G and charge transfer mediated by defect states generated through ultraviolet (UV) irradiation, which can significantly enhance the SERS sensitivity. The SERS substrate based on oxygen vacancy-engineered Co0.05Ti0.95O2 demonstrates an excellent sensitivity and recycling performance. The EF of R6G adsorbed on optimized Co0.05Ti0.95O2 with little Au is about 1.13 × 108, and the LOD is about 7.9 × 10-10 M with Rhodamine 6G (R6G) as the probe molecule. Furthermore, the highly ordered bowl-like ConTi1-nO2 arrays were prepared by photolithography, which exhibit superior stability, and the RSD of Rhodamine 6G (R6G) is about 3.6%.