超声波传感器
法布里-珀罗干涉仪
材料科学
信号(编程语言)
局部放电
干扰(通信)
声学
灵敏度(控制系统)
解调
光纤
光学
半径
振膜(声学)
光电子学
电压
振动
电子工程
波长
物理
电气工程
频道(广播)
计算机安全
量子力学
计算机科学
程序设计语言
工程类
作者
Ximin Zhang,Sen Qian,Huixin Liu,Chuan Chen,Chuanlu Deng,Chengyong Hu,Yi Huang
出处
期刊:Optica Applicata
[Wrocław University of Science and Technology]
日期:2023-01-01
卷期号:53 (2)
被引量:3
摘要
An ultrasonic sensor based on extrinsic Fabry–Pérot interference (EFPI) has been designed and demonstrated to detect the ultrasonic wave signal. The sensitivity and natural frequency of fiber Fabry–Pérot (F-P) sensor with different structure parameter have been simulated by COMSOL. The simulation results illustrate that the sensitivity is up to 1.737 nm/kPa and the natural frequency is 2.1 MHz, when the silica diaphragm thickness is 2 μm, the radius is 90 μm, and the cavity length is 18 μm. The most suitable parameters have been selected and the F-P sensor has been fabricated. When the ultrasonic signals with the frequencies of 40 kHz and 1.2 MHz are respectively applied to the sensor, the frequencies detected by the EFPI ultrasonic sensor are 39 kHz and 1.21 MHz based on a partial discharge detection experiment for the designed demodulation system. The experimental results show that the sensor can accurately detect ultrasonic signals. As an excellent platform for ultrasonic signal sensing, this EFPI ultrasonic sensing system has great potential applications in partial discharge detection field.
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