Friction Characteristics of Liquid Lubricated MEMS with Deterministic Boundary Slippage

It has been proven experimentally that boundary slippage represents a viable effect on the hydrodynamic performance of lubricated sliding contacts. Along with several friction reduction mechanisms that have been explored in the literature, the slippage parameters remain an important feature. With the main objective of evaluating the effects of the slippage, a modified Reynolds equation is employed. The result shows that deterministic boundary slippage of the lubricated-MEMS with uniform film thickness has a very beneficial effect on decreasing friction force as well as coefficient of friction.