A New in situ Preparation of Trimethylsilyl Trifluoromethanesulfonate by Thermally Induced Rearrangement A new in situ preparation of trimethylsilyl trifluoromethanesulfonate ( 3 ) is described: 3 is generated by a thermally induced rearrangement of (dimethylsilyl)methyl trifluoromethanesulfonate ( 2 ), which can be prepared by reaction of (CH 3 ) 2 Si(H)CH 2 OH ( 1 ) with (CF 3 SO 2 ) 2 O. Starting with C 6 H 5 (CH 3 )Si(H)CH 2 OH ( 5 ), the derivative (methylphenylsilyl)‐methyl trifluoromethanesulfonate ( 6 ) can be obtained by a similar method. Its thermally induced rearrangement leads to dimethylphenylsilyl trifluoromethanesulfonate ( 7 ). The rearrangements 2→3 and 6→7 were found to be first‐order reactions with half‐lifes at 80°C of 0.75 and 1.7 h, respectively.