A New in situ Preparation of Trimethylsilyl Trifluoromethanesulfonate by Thermally Induced Rearrangement A new in situ preparation of trimethylsilyl trifluoromethanesulfonate (3) is described: 3 is generated by a thermally induced rearrangement of (dimethylsilyl)methyl trifluoromethanesulfonate (2), which can be prepared by reaction of (CH3)2Si(H)CH2OH (1) with (CF3SO2)2O. Starting with C6H5(CH3)Si(H)CH2OH (5), the derivative (methylphenylsilyl)‐methyl trifluoromethanesulfonate (6) can be obtained by a similar method. Its thermally induced rearrangement leads to dimethylphenylsilyl trifluoromethanesulfonate (7). The rearrangements 2→3 and 6→7 were found to be first‐order reactions with half‐lifes at 80°C of 0.75 and 1.7 h, respectively.