离子注入
杂质
离子
化学计量学
材料科学
扩散
p-n结
分析化学(期刊)
兴奋剂
二次离子质谱法
退火(玻璃)
光电子学
外延
半导体
化学
物理化学
物理
有机化学
色谱法
热力学
作者
L. O. Bubulac,W. E. Tennant,D. S. Lo,D. D. Edwall,J. C. Robinson,J. S. Chen,G. Bostrup
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:1987-09-01
被引量:49
摘要
This work reports on two significantly different methods to form junctions in Hg1−xCdxTe by ion implantation: a ‘‘displaced Hg diffusion source’’ for n‐on‐p junctions and an ‘‘implanted species diffusion source’’ for p‐on‐n devices. For each one, the role of background impurities, stoichiometric defects, and implanted species of junction formation have been determined. In spite of superficial damage created by the implant, these methods produced implanted junctions of either type with low damage in the near‐junction region, resulting in excellent electrical characteristics.
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