Preparation and Corrosion Properties of a Tantalum Sputtered Thick Film

A tantalum sputtered film formed on the surface of stainless steel (AISI-316) has good corrosion resistance to hot sulphuric acid. Corrosion resistance of sputtered tantalum films, 6–20 μ thick is superior to that of other high quality corrosion resistant materials, such as niobium, titanium, zirconium, Hastelloy-B, and AISI-316 stainless steel. The corrosion rate of sputtered tantalum films is similar to that of 50 μ thick tantalum foil. Results of up to 1000 h corrosions tests, an adhesion strength test, and a bend test of the film are presented in this paper.