A New Type of TSV Defect Caused by BMD in Silicon Substrate

This paper reports on a new type of through-silicon via (TSV) defect, silicon fin defect, which was found after TSV deep-reactive-ion-etching (DRIE) process for TSV integration with front-end-of-line (FEOL) devices. One possible root cause for this defect is that the bulk micro defect (BMD) in silicon substrate serves as a micro-mask during etching and results in silicon fin defects at TSV bottom. These defects have to be eliminated as they are killer TSV defects for several reasons: (1) could serve as a weak point for isolation liner deposition; (2) could be a weak point for barrier/seed layer deposition; and (3) may cause mechanical failures during TSV backside reveal. Previously, silicon fin defects were removed by switching to a non-BMD silicon substrate for interposer application. However, for TSV integration with FEOL devices, the BMD layer serves as an intrinsic gettering layer for devices, therefore, it cannot be removed from the silicon substrate, which makes it challenging to get rid of silicon fin defects. In order to establish a non-destructive in-line detection method of the fin defects, scanning electron microscope (SEM) automatic process inspection (API) was set up to image the fin defects at the bottom of the trench. A special working point with high depth of focus (DoF) and contrast was created to obtain good top-down SEM imaging of the defects at the bottom of this high-aspect-ratio (HAR) structure. Three types of silicon substrates (A, B, and C) were used for this study to investigate the potential root cause. SEM API results show defect rates of 20%, 3.3% and 0% for substrates A, B, and C, respectively. This is in good agreement with both BMD simulation results and benchmarking data in which substrates A, B, and C had normalized BMD densities of 11.7, 5.74, and 1 cm-3, respectively, with a comparable BMD size of 80~90 nm and a denuded zone (DNZ) depth of 10~15 μm. The correlation between BMD density in a silicon substrate and silicon fin defect rate indicates that BMD is a key root cause for silicon fin defects. To eliminate silicon fin defects, an optimized DRIE process has been developed. On the same type of substrate, the DRIE process with a typical voltage bias results in a defect rate of 6.7%, while no silicon fin defect was detected out of 200 TSVs with a polynomial bias ramp to relatively higher final voltage bias during the last 15 μm etch. The hypothesis is that higher voltage bias is able to sputter away BMD and shows potential to get rid of the silicon fin defects at the TSV bottom. In summary, a capable inspection method, a preferred silicon substrate with BMD spec range, and a promising way for DRIE process optimization to eliminate the silicon fin defect at the TSV bottom have been identified and developed in this work. Detailed results and analysis, particularly the fin defect images, statistical inspection results, BMD benchmarking data, simulation results, and TSV profile with optimized process will be discussed in the paper.