The Hysteresis Modeling of Piezoelectric Actuator and Experimental Study on Its Open-loop Control

The piezoelectric displacement scanning technology can achieve nanometer resolution.However,the significant reduction of accuracy is brought because of the hysteresis.Based on the point symmetry characteristic in the hysteresis of the piezoelectric actuator from lots of experiments,a mathematical model of the hysteresis of the piezoelectric actuator has been established.This model fitted the ascending major branch based on the experimental data.Then we achieved the other descending or ascending branches according to the coincidence and point symmetry characteristics.At the same time the reversal model was obtained.The experiment of the open loop control on the piezoelectric actuator based on the inverse model showed that the control error range was between-36 nm and +47 nm.